Company profile | Vistec Electron Beam GmbH is providing leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research as electron-beam direct write in semiconductor manufacturing, mask making as well as integrated optics and several new emerging markets. In addition to its headquarter and production facility in Jena Germany, Vistec Electron Beam maintains service and support centers in Europe, Asia Pacific and in the US.
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Products & Services | Vistec Electron Beam GmbH develops, manufactures, sales and services 50kV Variable Shaped Beam lithography systems, which serve customers in both, semiconductor industry as well as advanced research, optics and several emerging markets.
Our main products are the Vistec SB254 – 200mm platform and the Vistec SB3050-2 – 300mm platform lithography system.
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References and export activities | In addition to its headquarter and production facility in Germany, Vistec Electron Beam maintains service and support centers in Europe,Asia Pacific and in the US.
Installations in Compound Semiconductor facilities in Asia Pacific & the US.
Installations in Advanced Research among others in Fraunhofer Institutes in Germany (e.G. Fraunhofer ENAS & Fraunhofer IOF).
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Target group | Our main customers are semiconductor foundries worldwide and advanced research facilities in Europe, like CEA Leti in France and Fraunhofer Institutes in Germany. Vistec provides systems to both key semiconductor manufacturers as well as Universities and Centers of Excellence. Our systems can be used in a wide range of existing and emerging semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research, integrated optics and Photonics.
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Competitive advantages | Vistec Electron Beam´s roots go back to the 1950´s when the company was part of Carl Zeiss Jena where the first electron microscope was developed. In 1974, the first commercial Variable Shaped Beam system was launched. Vistec Electron Beam GmbH has been active on the market in its current structure since 1996 with service and support worldwide.
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